SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS495
 
  
 
G03F PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 2102
 
  
 
F16F SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION158
 
  
 
G01D MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED BY A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR 159
 
  
 
G01M TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR166
 
  
 
G02B OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS 1204
 
  
 
G03B APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR 196
 
  
 
G05B CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS 1100
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 1361

Top Patents (by citation)

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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2015/0311,099 Wafer Stage Having Function of Anti-CollisionDec 06, 13Oct 29, 15[H01L]

Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9874818 Photolithographic illuminator that is telecentric in two directionsSep 25, 13Jan 23, 18[G03B, G03F]
9766054 Planar motor rotor displacement measuring device and its measuring methodFeb 08, 13Sep 19, 17[G01M, G01B, G01D, G03F]
9752643 Negative stiffness system for gravity compensation of micropositionerDec 06, 13Sep 05, 17[F16F, G03F]
9448488 Off-axis alignment system and alignment methodAug 05, 13Sep 20, 16[G03F]
9310782 Method for measuring displacement of planar motor rotorFeb 21, 13Apr 12, 16[G05B, G01B]
9036154 Four-axis four-subdividing interferometerJan 10, 14May 19, 15[G01B]
9036155 Six-axis four-subdividing interferometerJan 10, 14May 19, 15[G01B]

Expired/Abandoned/Withdrawn Patents

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Top Inventors for This Owner

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